Nanomechanical cantilever sensor using optical nanocavity resonator

Abstract

We present modeling results of a novel nanomechanical cantilever sensor using optical nanocavity resonator. A nanocavity resonator comprises two-hole pairs which are placed along a V-shaped silicon waveguide at the edge of cantilever. The resonant wavelength of output spectrum is sensitive to the shape of air holes and defect length of the nanocavity resonator. The minimum detectable strain vertical deflection at the cantilever end, and force load are observed as 0.0136%, 0.94J.μm and 0.046 pN for 50J.μm long cantilever. The measured strain is a linear function of resonant wavelength shift and applied force. This new sensing shows promising features for biomolecules detection. © 2009 IEEE.