Please use this identifier to cite or link to this item: https://doi.org/10.1109/NEMS.2009.5068700
Title: Nanomechanical cantilever sensor using optical nanocavity resonator
Authors: Lee, C. 
Xiang, W. 
Thillaigovindan, J.
Hsiaol, F.-L. 
Keywords: Nanomechanical
Nanophotonics
NEMS
Sensors
Issue Date: 2009
Source: Lee, C., Xiang, W., Thillaigovindan, J., Hsiaol, F.-L. (2009). Nanomechanical cantilever sensor using optical nanocavity resonator. 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009 : 808-812. ScholarBank@NUS Repository. https://doi.org/10.1109/NEMS.2009.5068700
Abstract: We present modeling results of a novel nanomechanical cantilever sensor using optical nanocavity resonator. A nanocavity resonator comprises two-hole pairs which are placed along a V-shaped silicon waveguide at the edge of cantilever. The resonant wavelength of output spectrum is sensitive to the shape of air holes and defect length of the nanocavity resonator. The minimum detectable strain vertical deflection at the cantilever end, and force load are observed as 0.0136%, 0.94J.μm and 0.046 pN for 50J.μm long cantilever. The measured strain is a linear function of resonant wavelength shift and applied force. This new sensing shows promising features for biomolecules detection. © 2009 IEEE.
Source Title: 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009
URI: http://scholarbank.nus.edu.sg/handle/10635/71086
ISBN: 9781424446308
DOI: 10.1109/NEMS.2009.5068700
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