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Title: Vibration measurement of a micro-structure by digital holographic microscopy
Authors: Shi, H. 
Fu, Y. 
Quan, C. 
Tay, C.J. 
He, X.
Keywords: Digital holography
MEMS characterization
Temporal analysis
Vibration measurement
Issue Date: 2009
Citation: Shi, H., Fu, Y., Quan, C., Tay, C.J., He, X. (2009). Vibration measurement of a micro-structure by digital holographic microscopy. Measurement Science and Technology 20 (6) : -. ScholarBank@NUS Repository.
Abstract: A method for the vibration measurement of a micro-electro-mechanical system (MEMS) structure based on digital holographic microscopy (DHM) is presented. A sequence of digital holograms of a vibrating micro-beam excited by varying voltage is captured by a high-speed CCD camera. The phase changes of the object at different instants are obtained by digital reconstruction. The displacement, velocity and acceleration are evaluated by both spatial and temporal Fourier and windowed Fourier analyses. The results show that digital holographic microscopy with Fourier analyses is an effective method for evaluating the dynamic characteristics of a MEMS component. © 2009 IOP Publishing Ltd.
Source Title: Measurement Science and Technology
ISSN: 09570233
DOI: 10.1088/0957-0233/20/6/065301
Appears in Collections:Staff Publications

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