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|Title:||Vibration measurement of a micro-structure by digital holographic microscopy|
|Authors:||Shi, H. |
|Citation:||Shi, H., Fu, Y., Quan, C., Tay, C.J., He, X. (2009). Vibration measurement of a micro-structure by digital holographic microscopy. Measurement Science and Technology 20 (6) : -. ScholarBank@NUS Repository. https://doi.org/10.1088/0957-0233/20/6/065301|
|Abstract:||A method for the vibration measurement of a micro-electro-mechanical system (MEMS) structure based on digital holographic microscopy (DHM) is presented. A sequence of digital holograms of a vibrating micro-beam excited by varying voltage is captured by a high-speed CCD camera. The phase changes of the object at different instants are obtained by digital reconstruction. The displacement, velocity and acceleration are evaluated by both spatial and temporal Fourier and windowed Fourier analyses. The results show that digital holographic microscopy with Fourier analyses is an effective method for evaluating the dynamic characteristics of a MEMS component. © 2009 IOP Publishing Ltd.|
|Source Title:||Measurement Science and Technology|
|Appears in Collections:||Staff Publications|
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