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https://doi.org/10.1016/S0030-4018(01)01476-6
Title: | Study on deformation of a microphone membrane using multiple-wavelength interferometry | Authors: | Quan, C. Tay, C.J. Wang, S.H. Shang, H.M. Chan, K.C. |
Keywords: | Deformation measurement Membrane Microphone Multiple-wavelength contouring Optical interferometry |
Issue Date: | 1-Oct-2001 | Citation: | Quan, C., Tay, C.J., Wang, S.H., Shang, H.M., Chan, K.C. (2001-10-01). Study on deformation of a microphone membrane using multiple-wavelength interferometry. Optics Communications 197 (4-6) : 279-287. ScholarBank@NUS Repository. https://doi.org/10.1016/S0030-4018(01)01476-6 | Abstract: | Determination of deformation of a microphone membrane under electrical loads (varying voltage) is of fundamental importance for the design and fabrication of a microphone. This paper reports a technique for measuring the deformation of a thin membrane (2 μm) in a silicon-based condenser microphone. A typical condenser microphone consists of two parts: a compliant membrane and a perforated rigid backplate. Interference patterns under various interference filters with wavelengths of 700, 589 and 532 nm are recorded through a microscope by a CCD sensor. A simple algorithm for recording both integral and fractional fringes using different wavelengths is presented. From the fringe pattern deformation of the membrane in the sub-micron range is obtained. The proposed method enhances the lateral resolution and improves measurement accuracy. © 2001 Elsevier Science B.V. All rights reserved. | Source Title: | Optics Communications | URI: | http://scholarbank.nus.edu.sg/handle/10635/61412 | ISSN: | 00304018 | DOI: | 10.1016/S0030-4018(01)01476-6 |
Appears in Collections: | Staff Publications |
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