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|Title:||Study on deformation of a microphone membrane using multiple-wavelength interferometry|
|Authors:||Quan, C. |
|Citation:||Quan, C., Tay, C.J., Wang, S.H., Shang, H.M., Chan, K.C. (2001-10-01). Study on deformation of a microphone membrane using multiple-wavelength interferometry. Optics Communications 197 (4-6) : 279-287. ScholarBank@NUS Repository. https://doi.org/10.1016/S0030-4018(01)01476-6|
|Abstract:||Determination of deformation of a microphone membrane under electrical loads (varying voltage) is of fundamental importance for the design and fabrication of a microphone. This paper reports a technique for measuring the deformation of a thin membrane (2 μm) in a silicon-based condenser microphone. A typical condenser microphone consists of two parts: a compliant membrane and a perforated rigid backplate. Interference patterns under various interference filters with wavelengths of 700, 589 and 532 nm are recorded through a microscope by a CCD sensor. A simple algorithm for recording both integral and fractional fringes using different wavelengths is presented. From the fringe pattern deformation of the membrane in the sub-micron range is obtained. The proposed method enhances the lateral resolution and improves measurement accuracy. © 2001 Elsevier Science B.V. All rights reserved.|
|Source Title:||Optics Communications|
|Appears in Collections:||Staff Publications|
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