Please use this identifier to cite or link to this item: https://doi.org/10.1016/S0030-4018(01)01476-6
Title: Study on deformation of a microphone membrane using multiple-wavelength interferometry
Authors: Quan, C. 
Tay, C.J. 
Wang, S.H. 
Shang, H.M. 
Chan, K.C.
Keywords: Deformation measurement
Membrane
Microphone
Multiple-wavelength contouring
Optical interferometry
Issue Date: 1-Oct-2001
Source: Quan, C., Tay, C.J., Wang, S.H., Shang, H.M., Chan, K.C. (2001-10-01). Study on deformation of a microphone membrane using multiple-wavelength interferometry. Optics Communications 197 (4-6) : 279-287. ScholarBank@NUS Repository. https://doi.org/10.1016/S0030-4018(01)01476-6
Abstract: Determination of deformation of a microphone membrane under electrical loads (varying voltage) is of fundamental importance for the design and fabrication of a microphone. This paper reports a technique for measuring the deformation of a thin membrane (2 μm) in a silicon-based condenser microphone. A typical condenser microphone consists of two parts: a compliant membrane and a perforated rigid backplate. Interference patterns under various interference filters with wavelengths of 700, 589 and 532 nm are recorded through a microscope by a CCD sensor. A simple algorithm for recording both integral and fractional fringes using different wavelengths is presented. From the fringe pattern deformation of the membrane in the sub-micron range is obtained. The proposed method enhances the lateral resolution and improves measurement accuracy. © 2001 Elsevier Science B.V. All rights reserved.
Source Title: Optics Communications
URI: http://scholarbank.nus.edu.sg/handle/10635/61412
ISSN: 00304018
DOI: 10.1016/S0030-4018(01)01476-6
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