Please use this identifier to cite or link to this item:
|Title:||Micromachined in-plane vibrating diffraction grating laser scanner||Authors:||Zhou, G.
|Issue Date:||Oct-2004||Citation:||Zhou, G., Logeeswaran, V.J., Chau, F.S., Tay, F.E.H. (2004-10). Micromachined in-plane vibrating diffraction grating laser scanner. IEEE Photonics Technology Letters 16 (10) : 2293-2295. ScholarBank@NUS Repository. https://doi.org/10.1109/LPT.2004.834847||Abstract:||In this letter, we present a novel micromachined vibrating diffraction-grating laser scanner that utilizes in-plane angular vibration of a planar diffraction grating causing the diffracted laser beam to scan. The proposed micromachined diffraction-grating laser scanner can operate with low voltage and has the potential to scan at high frequencies without the optical performance degradation due to dynamic nonrigid-body deformation, which is prevalent in conventional high-speed out-of-plane torsional micromirror scanners. A prototype grating scanner has been developed using micromachining technology to demonstrate this new microscanner principle. The tested device is capable of scanning an optical angle of 15.9° with virtually bow-free scan-line at a resonant frequency of 8.34 kHz for a 635-nm wavelength incident laser beam, electrostatically driven by 15-V dc bias and 15-V ac voltages. © 2004 IEEE.||Source Title:||IEEE Photonics Technology Letters||URI:||http://scholarbank.nus.edu.sg/handle/10635/60746||ISSN:||10411135||DOI:||10.1109/LPT.2004.834847|
|Appears in Collections:||Staff Publications|
Show full item record
Files in This Item:
There are no files associated with this item.
checked on Apr 2, 2020
WEB OF SCIENCETM
checked on Mar 17, 2020
checked on Mar 30, 2020
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.