Please use this identifier to cite or link to this item: https://doi.org/10.1109/LPT.2004.834847
Title: Micromachined in-plane vibrating diffraction grating laser scanner
Authors: Zhou, G. 
Logeeswaran, V.J. 
Chau, F.S. 
Tay, F.E.H. 
Issue Date: Oct-2004
Source: Zhou, G.,Logeeswaran, V.J.,Chau, F.S.,Tay, F.E.H. (2004-10). Micromachined in-plane vibrating diffraction grating laser scanner. IEEE Photonics Technology Letters 16 (10) : 2293-2295. ScholarBank@NUS Repository. https://doi.org/10.1109/LPT.2004.834847
Abstract: In this letter, we present a novel micromachined vibrating diffraction-grating laser scanner that utilizes in-plane angular vibration of a planar diffraction grating causing the diffracted laser beam to scan. The proposed micromachined diffraction-grating laser scanner can operate with low voltage and has the potential to scan at high frequencies without the optical performance degradation due to dynamic nonrigid-body deformation, which is prevalent in conventional high-speed out-of-plane torsional micromirror scanners. A prototype grating scanner has been developed using micromachining technology to demonstrate this new microscanner principle. The tested device is capable of scanning an optical angle of 15.9° with virtually bow-free scan-line at a resonant frequency of 8.34 kHz for a 635-nm wavelength incident laser beam, electrostatically driven by 15-V dc bias and 15-V ac voltages. © 2004 IEEE.
Source Title: IEEE Photonics Technology Letters
URI: http://scholarbank.nus.edu.sg/handle/10635/60746
ISSN: 10411135
DOI: 10.1109/LPT.2004.834847
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