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|Title:||Application of micro-ball bearing on Si for high rolling life-cycle||Authors:||Sinha, S.K.
|Issue Date:||Jan-2010||Citation:||Sinha, S.K., Pang, R., Tang, X. (2010-01). Application of micro-ball bearing on Si for high rolling life-cycle. Tribology International 43 (1-2) : 178-187. ScholarBank@NUS Repository. https://doi.org/10.1016/j.triboint.2009.05.015||Abstract:||In this paper, we introduce a new class of micro-ball bearing that can be applied between two Si surfaces in relative motion where wear is a problem. Wide channel was created on one Si plate for all the ball bearings to roll within this channel rather than in individual grooves. This type of micro-bearings can be applied as friction reducers to micro- and nano-machines. The tribometer set-up consisted of a top plate (Si wafer), which was connected to a conventional bearing, resting on a bottom plate (also Si wafer) that was rotated at 300 and 500 RPM by a DC motor. Borosilicate glass micro-spheres, 53±3.7 μm in diameter, were rotated between the two circular silicon plates (15 mm diameter) under a dead weight of 235 μN and in high-humidity conditions (75% relative humidity (RH)). Tests on the plate with wide channel consistently exceeded 1 million cycles of rotation without failure of the bearing. The main factors affecting the life-cycle are identified as the presence of a wide channel, ball dispersion, and alignment of the Si plates. © 2009 Elsevier Ltd. All rights reserved.||Source Title:||Tribology International||URI:||http://scholarbank.nus.edu.sg/handle/10635/59562||ISSN:||0301679X||DOI:||10.1016/j.triboint.2009.05.015|
|Appears in Collections:||Staff Publications|
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