Please use this identifier to cite or link to this item: https://doi.org/10.1117/1.602535
Title: Surface roughness measurement in the submicrometer range using laser scattering
Authors: Wang, S.H. 
Quan, C. 
Tay, C.J. 
Shang, H.M. 
Issue Date: Jun-2000
Citation: Wang, S.H., Quan, C., Tay, C.J., Shang, H.M. (2000-06). Surface roughness measurement in the submicrometer range using laser scattering. Optical Engineering 39 (6) : 1597-1601. ScholarBank@NUS Repository. https://doi.org/10.1117/1.602535
Abstract: A technique for measuring surface roughness in the submicrometer range is developed. The principle of the method is based on laser scattering from a rough surface. A telecentric optical setup that uses a laser diode as a light source is used to record the light field scattered from the surface of a rough object. The light intensity distribution of the scattered band, which is correlated to the surface roughness, is recorded by a linear photodiode array and analyzed using a single-chip microcomputer. Several sets of test surfaces prepared by different machining processes are measured and a method for the evaluation of surface roughness is proposed.
Source Title: Optical Engineering
URI: http://scholarbank.nus.edu.sg/handle/10635/58753
ISSN: 00913286
DOI: 10.1117/1.602535
Appears in Collections:Staff Publications

Show full item record
Files in This Item:
There are no files associated with this item.

SCOPUSTM   
Citations

38
checked on Oct 23, 2020

WEB OF SCIENCETM
Citations

32
checked on Oct 15, 2020

Page view(s)

108
checked on Oct 24, 2020

Google ScholarTM

Check

Altmetric


Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.