Please use this identifier to cite or link to this item: https://doi.org/10.1117/1.602535
Title: Surface roughness measurement in the submicrometer range using laser scattering
Authors: Wang, S.H. 
Quan, C. 
Tay, C.J. 
Shang, H.M. 
Issue Date: Jun-2000
Citation: Wang, S.H., Quan, C., Tay, C.J., Shang, H.M. (2000-06). Surface roughness measurement in the submicrometer range using laser scattering. Optical Engineering 39 (6) : 1597-1601. ScholarBank@NUS Repository. https://doi.org/10.1117/1.602535
Abstract: A technique for measuring surface roughness in the submicrometer range is developed. The principle of the method is based on laser scattering from a rough surface. A telecentric optical setup that uses a laser diode as a light source is used to record the light field scattered from the surface of a rough object. The light intensity distribution of the scattered band, which is correlated to the surface roughness, is recorded by a linear photodiode array and analyzed using a single-chip microcomputer. Several sets of test surfaces prepared by different machining processes are measured and a method for the evaluation of surface roughness is proposed.
Source Title: Optical Engineering
URI: http://scholarbank.nus.edu.sg/handle/10635/58753
ISSN: 00913286
DOI: 10.1117/1.602535
Appears in Collections:Staff Publications

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