Performance trends of on-chip spiral inductors for RFICs

Abstract

Performance trends varying with different geometrical parameters for on-chip spiral inductors: (a) with fixed inner-dimension, (b) with outer-dimension, and (c) variation in both inner- and outerdimensions are extensively investigated in this paper. The relationships for the inductance, Q-factor and self-resonance frequency (SRF) with various geometrical parameters, such as track width, track spacing, and turn numbers are examined on an extensive experiment basis. These performance trends can be a good guideline for practical inductor designs in RFICs.