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https://doi.org/10.1023/A:1011234430943
Title: | Mathematical modelling on the quadrature error of low-rate microgyroscope for aerospace applications | Authors: | Yeh, B.Y. Liang, Y.C. Tay, F.E.H. |
Keywords: | Low-rate microgyroscope Microsystem modelling Quadrature error modelling |
Issue Date: | Oct-2001 | Citation: | Yeh, B.Y., Liang, Y.C., Tay, F.E.H. (2001-10). Mathematical modelling on the quadrature error of low-rate microgyroscope for aerospace applications. Analog Integrated Circuits and Signal Processing 29 (1-2) : 85-94. ScholarBank@NUS Repository. https://doi.org/10.1023/A:1011234430943 | Abstract: | This paper presents the mathematical modelling on the quadrature error of a microgyroscope due to the imbalance of the asymmetric spring flexures. Quadrature error occurs when the proof mass of a microgyroscope oscillates along an axis that is not exactly parallel to the lateral-axis. The imbalance due to manufacturing variation can cause the proof mass to rotate when a force acts on the proof mass. The proposed mathematical model was verified by the finite element software IntelliCAD, and found to have a good agreement on angles of rotation of comb fingers. The mathematical model provides a new avenue in evaluating the quadrature error system and in saving the overall simulation time. | Source Title: | Analog Integrated Circuits and Signal Processing | URI: | http://scholarbank.nus.edu.sg/handle/10635/56588 | ISSN: | 09251030 | DOI: | 10.1023/A:1011234430943 |
Appears in Collections: | Staff Publications |
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