Please use this identifier to cite or link to this item: https://doi.org/10.1023/A:1011234430943
Title: Mathematical modelling on the quadrature error of low-rate microgyroscope for aerospace applications
Authors: Yeh, B.Y.
Liang, Y.C. 
Tay, F.E.H. 
Keywords: Low-rate microgyroscope
Microsystem modelling
Quadrature error modelling
Issue Date: Oct-2001
Source: Yeh, B.Y., Liang, Y.C., Tay, F.E.H. (2001-10). Mathematical modelling on the quadrature error of low-rate microgyroscope for aerospace applications. Analog Integrated Circuits and Signal Processing 29 (1-2) : 85-94. ScholarBank@NUS Repository. https://doi.org/10.1023/A:1011234430943
Abstract: This paper presents the mathematical modelling on the quadrature error of a microgyroscope due to the imbalance of the asymmetric spring flexures. Quadrature error occurs when the proof mass of a microgyroscope oscillates along an axis that is not exactly parallel to the lateral-axis. The imbalance due to manufacturing variation can cause the proof mass to rotate when a force acts on the proof mass. The proposed mathematical model was verified by the finite element software IntelliCAD, and found to have a good agreement on angles of rotation of comb fingers. The mathematical model provides a new avenue in evaluating the quadrature error system and in saving the overall simulation time.
Source Title: Analog Integrated Circuits and Signal Processing
URI: http://scholarbank.nus.edu.sg/handle/10635/56588
ISSN: 09251030
DOI: 10.1023/A:1011234430943
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