Initial experimental results on a magnetic beam separator spectrometer for the SEM

Abstract

This article describes preliminary experiments to test the concept of scanning electron microscope (SEM) using a round magnetic beam separator to perform energy spectroscopy. Two experiments with an add-on attachment inside a conventional SEM were performed, one to estimate the sector image aberrations and the other to capture an energy spectrum of scattered electrons. The experiments show that the sector image aberrations lie well below 2 nm and that it is possible to capture the energy spectrum of secondary electrons. © 2009 Elsevier B.V. All rights reserved.