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Title: First harmonic (2f) characterisation of resonant frequency and Q-factor of micromechanical transducers
Authors: Logeeswaran, V.J. 
Tay, F.E.H. 
Chan, M.L.
Chau, F.S. 
Liang, Y.C. 
Keywords: Electrostatic drive
Experimental modal analysis
First harmonic (2f)
Lock-in technique
Lorentzian curve-fitting
Resonance curve area (RCA)
Issue Date: Oct-2003
Citation: Logeeswaran, V.J., Tay, F.E.H., Chan, M.L., Chau, F.S., Liang, Y.C. (2003-10). First harmonic (2f) characterisation of resonant frequency and Q-factor of micromechanical transducers. Analog Integrated Circuits and Signal Processing 37 (1) : 17-33. ScholarBank@NUS Repository.
Abstract: In this paper, the response to the first harmonic component (2f) of the electrostatic force in single terminal driven electrostatic comb-drive and parallel-plate drive was used as a signal to extract device parameters, namely, the Q-factor and resonant frequency instead of the fundamental (1f) resonance response. It is shown that the difficulty in motional measurement due to electrical cross-talk (parasitics) using 1f measurement can be overcome with a higher signal-to-noise ratio of the 2f signal. Both atmospheric (low-Q) and reduced pressure environment were investigated using off-chip electronics and lock-in amplifier. The measurements were done on the electrostatic comb-drive and capacitive parallel plate sensing plates that form the two core modules of a yaw rate sensor (dual-axis resonator). The effects of AC and DC bias voltages on the measured response have been investigated. Experimental amplitude and phase response data have been analysed using the Lorentzian curve-fit, Resonance Curve Area (RCA) method, the half-power bandwidth method (3 dB) and the Nyquist plot for data fitting and determination of the Q-factor and resonance frequency.
Source Title: Analog Integrated Circuits and Signal Processing
ISSN: 09251030
DOI: 10.1023/A:1024816600152
Appears in Collections:Staff Publications

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