Please use this identifier to cite or link to this item:
https://doi.org/10.1023/A:1024816600152
DC Field | Value | |
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dc.title | First harmonic (2f) characterisation of resonant frequency and Q-factor of micromechanical transducers | |
dc.contributor.author | Logeeswaran, V.J. | |
dc.contributor.author | Tay, F.E.H. | |
dc.contributor.author | Chan, M.L. | |
dc.contributor.author | Chau, F.S. | |
dc.contributor.author | Liang, Y.C. | |
dc.date.accessioned | 2014-06-17T02:50:18Z | |
dc.date.available | 2014-06-17T02:50:18Z | |
dc.date.issued | 2003-10 | |
dc.identifier.citation | Logeeswaran, V.J., Tay, F.E.H., Chan, M.L., Chau, F.S., Liang, Y.C. (2003-10). First harmonic (2f) characterisation of resonant frequency and Q-factor of micromechanical transducers. Analog Integrated Circuits and Signal Processing 37 (1) : 17-33. ScholarBank@NUS Repository. https://doi.org/10.1023/A:1024816600152 | |
dc.identifier.issn | 09251030 | |
dc.identifier.uri | http://scholarbank.nus.edu.sg/handle/10635/56066 | |
dc.description.abstract | In this paper, the response to the first harmonic component (2f) of the electrostatic force in single terminal driven electrostatic comb-drive and parallel-plate drive was used as a signal to extract device parameters, namely, the Q-factor and resonant frequency instead of the fundamental (1f) resonance response. It is shown that the difficulty in motional measurement due to electrical cross-talk (parasitics) using 1f measurement can be overcome with a higher signal-to-noise ratio of the 2f signal. Both atmospheric (low-Q) and reduced pressure environment were investigated using off-chip electronics and lock-in amplifier. The measurements were done on the electrostatic comb-drive and capacitive parallel plate sensing plates that form the two core modules of a yaw rate sensor (dual-axis resonator). The effects of AC and DC bias voltages on the measured response have been investigated. Experimental amplitude and phase response data have been analysed using the Lorentzian curve-fit, Resonance Curve Area (RCA) method, the half-power bandwidth method (3 dB) and the Nyquist plot for data fitting and determination of the Q-factor and resonance frequency. | |
dc.description.uri | http://libproxy1.nus.edu.sg/login?url=http://dx.doi.org/10.1023/A:1024816600152 | |
dc.source | Scopus | |
dc.subject | Electrostatic drive | |
dc.subject | Experimental modal analysis | |
dc.subject | First harmonic (2f) | |
dc.subject | Lock-in technique | |
dc.subject | Lorentzian curve-fitting | |
dc.subject | Resonance curve area (RCA) | |
dc.type | Article | |
dc.contributor.department | ELECTRICAL & COMPUTER ENGINEERING | |
dc.contributor.department | MECHANICAL ENGINEERING | |
dc.description.doi | 10.1023/A:1024816600152 | |
dc.description.sourcetitle | Analog Integrated Circuits and Signal Processing | |
dc.description.volume | 37 | |
dc.description.issue | 1 | |
dc.description.page | 17-33 | |
dc.description.coden | AICPE | |
dc.identifier.isiut | 000184345600003 | |
Appears in Collections: | Staff Publications |
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