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Title: Double-level spiral inductors with multiple-via interconnects on GaAs substrates
Authors: Yin, W.-Y. 
Pan, S.-J.
Li, L.-W. 
Keywords: Double-level spiral inductors
Multiple vias interconnect
Q factor
Resonant frequency
Issue Date: May-2004
Citation: Yin, W.-Y., Pan, S.-J., Li, L.-W. (2004-05). Double-level spiral inductors with multiple-via interconnects on GaAs substrates. IEEE Transactions on Magnetics 40 (3) : 1756-1758. ScholarBank@NUS Repository.
Abstract: In this letter, we report the electromagnetic characteristics of on-chip double-level square spiral inductors. The inductors are unique in that the double-level spirals are interconnected by multiple vias with one air bridge, instead of the usual "single-via-at-center" interconnect. We show that, in spite of a decrease in resonant frequency, inductance as well as Q factor are greatly improved over those of single-level spiral geometries, and this could be due to the enhancement of electromagnetic coupling between double spirals.
Source Title: IEEE Transactions on Magnetics
ISSN: 00189464
DOI: 10.1109/TMAG.2004.826912
Appears in Collections:Staff Publications

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