Developments in the design of a spectroscopic scanning electron microscope

Abstract

This paper develops the design of a spectroscopic scanning electron microscope (SEM), one that can combine the acquisition of high image resolution with the capture of the full energy spectrum of scattered electrons. The proposal is based upon the use of segmented magnetic sector plates to both deflect the primary beam and at the same time provide energy dispersion for the scattered electrons. Simulations of the design are carried out via numerical direct ray tracing. They predict that the spectroscopic SEM should be able to acquire the whole energy spectrum of scattered electrons in parallel, captured by a single multi-channel detector. They also predict that first-order focusing at the detector plane can be achieved, and that collection of the scattered electrons can be made with high transport efficiency, close to 100%. © 2005 Elsevier B.V. All rights reserved.