Please use this identifier to cite or link to this item:
|Title:||A 2-DOF circular-resonator-driven in-plane vibratory grating laser scanner||Authors:||Du, Y.
|Issue Date:||2009||Citation:||Du, Y., Zhou, G., Cheo, K.L., Zhang, Q., Feng, H., Chau, F.S. (2009). A 2-DOF circular-resonator-driven in-plane vibratory grating laser scanner. Journal of Microelectromechanical Systems 18 (4) : 892-904. ScholarBank@NUS Repository. https://doi.org/10.1109/JMEMS.2009.2023844||Abstract:||In this paper, we present the design, modeling, fabrication, and measurement results of a microelectromechanical systems (MEMS)-based in-plane vibratory grating scanner driven by a two-degree-of-freedom (2-DOF) comb-driven circular resonator for high-speed laser scanning applications. Diffraction grating driven by a 2-DOF circular resonator has the potential to scan at large amplitudes compared with those driven by a one-degree-of-freedom (1-DOF) comb-driven circular resonator or a 2-DOF electrical comb-driven lateral-to-rotational resonator. We have demonstrated that our prototype device, with a 1-mm-diameter diffraction grating is capable of scanning at 20.289 kHz with an optical scan angle of around 25°. A refined theoretical model with fewer assumptions is proposed, which can make the prediction of dynamic performance much more accurate. © 2009 IEEE.||Source Title:||Journal of Microelectromechanical Systems||URI:||http://scholarbank.nus.edu.sg/handle/10635/53885||ISSN:||10577157||DOI:||10.1109/JMEMS.2009.2023844|
|Appears in Collections:||Staff Publications|
Show full item record
Files in This Item:
There are no files associated with this item.
checked on Dec 2, 2022
WEB OF SCIENCETM
checked on Nov 23, 2022
checked on Nov 24, 2022
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.