Please use this identifier to cite or link to this item: https://doi.org/10.1109/JMEMS.2009.2023844
Title: A 2-DOF circular-resonator-driven in-plane vibratory grating laser scanner
Authors: Du, Y. 
Zhou, G. 
Cheo, K.L. 
Zhang, Q.
Feng, H.
Chau, F.S. 
Keywords: Diffraction grating
Micro-opto-electromechanical systems
Microresonators
Microscanners
Issue Date: 2009
Source: Du, Y., Zhou, G., Cheo, K.L., Zhang, Q., Feng, H., Chau, F.S. (2009). A 2-DOF circular-resonator-driven in-plane vibratory grating laser scanner. Journal of Microelectromechanical Systems 18 (4) : 892-904. ScholarBank@NUS Repository. https://doi.org/10.1109/JMEMS.2009.2023844
Abstract: In this paper, we present the design, modeling, fabrication, and measurement results of a microelectromechanical systems (MEMS)-based in-plane vibratory grating scanner driven by a two-degree-of-freedom (2-DOF) comb-driven circular resonator for high-speed laser scanning applications. Diffraction grating driven by a 2-DOF circular resonator has the potential to scan at large amplitudes compared with those driven by a one-degree-of-freedom (1-DOF) comb-driven circular resonator or a 2-DOF electrical comb-driven lateral-to-rotational resonator. We have demonstrated that our prototype device, with a 1-mm-diameter diffraction grating is capable of scanning at 20.289 kHz with an optical scan angle of around 25°. A refined theoretical model with fewer assumptions is proposed, which can make the prediction of dynamic performance much more accurate. © 2009 IEEE.
Source Title: Journal of Microelectromechanical Systems
URI: http://scholarbank.nus.edu.sg/handle/10635/53885
ISSN: 10577157
DOI: 10.1109/JMEMS.2009.2023844
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