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|Title:||Image formation by use of the geometrical theory of diffraction||Authors:||Khoh, A.
|Issue Date:||Jun-2004||Citation:||Khoh, A., Samudra, G.S., Wu, Y., Milster, T., Choi, B. (2004-06). Image formation by use of the geometrical theory of diffraction. Journal of the Optical Society of America A: Optics and Image Science, and Vision 21 (6) : 959-967. ScholarBank@NUS Repository. https://doi.org/10.1364/JOSAA.21.000959||Abstract:||A deeper understanding of imaging behavior is needed with the widespread adoption of optical proximity correction in advanced lithography processes. To gain insight into the printing behavior of different mask pattern configurations, we derive edge-based and vertex-based image models by combining concepts contained in the geometrical theory of diffraction and Hopkins's image model. The models are scalar models and apply to planar, perfectly conducting mask objects. © 2004 Optical Society of America.||Source Title:||Journal of the Optical Society of America A: Optics and Image Science, and Vision||URI:||http://scholarbank.nus.edu.sg/handle/10635/50943||ISSN:||10847529||DOI:||10.1364/JOSAA.21.000959|
|Appears in Collections:||Staff Publications|
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