Please use this identifier to cite or link to this item:
|Title:||Image formation by use of the geometrical theory of diffraction|
|Citation:||Khoh, A., Samudra, G.S., Wu, Y., Milster, T., Choi, B. (2004-06). Image formation by use of the geometrical theory of diffraction. Journal of the Optical Society of America A: Optics and Image Science, and Vision 21 (6) : 959-967. ScholarBank@NUS Repository. https://doi.org/10.1364/JOSAA.21.000959|
|Abstract:||A deeper understanding of imaging behavior is needed with the widespread adoption of optical proximity correction in advanced lithography processes. To gain insight into the printing behavior of different mask pattern configurations, we derive edge-based and vertex-based image models by combining concepts contained in the geometrical theory of diffraction and Hopkins's image model. The models are scalar models and apply to planar, perfectly conducting mask objects. © 2004 Optical Society of America.|
|Source Title:||Journal of the Optical Society of America A: Optics and Image Science, and Vision|
|Appears in Collections:||Staff Publications|
Show full item record
Files in This Item:
There are no files associated with this item.
checked on Aug 14, 2018
WEB OF SCIENCETM
checked on Jul 25, 2018
checked on Aug 3, 2018
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.