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Title: | FABRICATION AND CHARACTERIZATION OF FERROELECTRIC HF0.5ZR0.5O2 THIN FILMS | Authors: | WU YICHEN | ORCID iD: | orcid.org/0009-0002-4413-1304 | Keywords: | Hafnia,Ferroelectricicty,Epitaxial growth,thin film,Oxygen vacancies,HZO | Issue Date: | 16-Aug-2023 | Citation: | WU YICHEN (2023-08-16). FABRICATION AND CHARACTERIZATION OF FERROELECTRIC HF0.5ZR0.5O2 THIN FILMS. ScholarBank@NUS Repository. | URI: | https://scholarbank.nus.edu.sg/handle/10635/245832 |
Appears in Collections: | Master's Theses (Closed) |
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