Please use this identifier to cite or link to this item:
Title: Suspended silicon waveguide with sub-wavelength grating cladding for optical mems in mid-infrared
Authors: Qiao, Qifeng 
Sun, Haoyang 
Liu, Xinmiao 
Dong, Bowei 
Xia, Ji
Lee, Chengkuo 
Zhou, Guangya 
Keywords: MIR photonics
Optical MEMS
Photonic integrated circuit
Reconfigurable photonics
Silicon photonics
Issue Date: 26-Oct-2021
Publisher: MDPI
Citation: Qiao, Qifeng, Sun, Haoyang, Liu, Xinmiao, Dong, Bowei, Xia, Ji, Lee, Chengkuo, Zhou, Guangya (2021-10-26). Suspended silicon waveguide with sub-wavelength grating cladding for optical mems in mid-infrared. Micromachines 12 (11) : 1311. ScholarBank@NUS Repository.
Rights: Attribution 4.0 International
Abstract: Mid-infrared (MIR) photonics are generating considerable interest because of the potential applications in spectroscopic sensing, thermal imaging, and remote sensing. Silicon photonics is believed to be a promising solution to realize MIR photonic integrated circuits (PICs). The past decade has seen a huge growth in MIR PIC building blocks. However, there is still a need for the development of MIR reconfigurable photonics to enable powerful on-chip optical systems and new functionalities. In this paper, we present an MIR (3.7~4.1 µm wavelength range) MEMS reconfiguration approach using the suspended silicon waveguide platform on the silicon-on-insulator. With the sub-wavelength grating claddings, the photonic waveguide can be well integrated with the MEMS actuator, thus offering low-loss, energy-efficient, and effective reconfiguration. We present a simulation study on the waveguide design and depict the MEMS-integration approach. Moreover, we experimentally report the suspended waveguide with propagation loss (?2.9 dB/cm) and bending loss (?0.076 dB each). The suspended waveguide coupler is experimentally investigated. In addition, we validate the proposed optical MEMS approach using a reconfigurable ring resonator design. In conclusion, we experimentally demonstrate the proposed waveguide platform’s capability for MIR MEMS-reconfigurable photonics, which empowers the MIR on-chip optical systems for various applications. © 2021 by the authors. Licensee MDPI, Basel, Switzerland.
Source Title: Micromachines
ISSN: 2072-666X
DOI: 10.3390/mi12111311
Rights: Attribution 4.0 International
Appears in Collections:Staff Publications

Show full item record
Files in This Item:
File Description SizeFormatAccess SettingsVersion 
10_3390_mi12111311.pdf3.12 MBAdobe PDF



Google ScholarTM



This item is licensed under a Creative Commons License Creative Commons