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https://doi.org/10.3390/nano11102556
Title: | Review of Si-based GeSn CVD growth and optoelectronic applications | Authors: | Miao, Yuanhao Wang, Guilei Kong, Zhenzhen Xu, Buqing Zhao, Xuewei Luo, Xue Lin, Hongxiao Dong, Yan Lu, Bin Dong, Linpeng Zhou, Jiuren Liu, Jinbiao Radamson, Henry H. |
Keywords: | CVD Detectors GeSn Lasers Transistors |
Issue Date: | 29-Sep-2021 | Publisher: | MDPI | Citation: | Miao, Yuanhao, Wang, Guilei, Kong, Zhenzhen, Xu, Buqing, Zhao, Xuewei, Luo, Xue, Lin, Hongxiao, Dong, Yan, Lu, Bin, Dong, Linpeng, Zhou, Jiuren, Liu, Jinbiao, Radamson, Henry H. (2021-09-29). Review of Si-based GeSn CVD growth and optoelectronic applications. Nanomaterials 11 (10) : 2556. ScholarBank@NUS Repository. https://doi.org/10.3390/nano11102556 | Rights: | Attribution 4.0 International | Abstract: | GeSn alloys have already attracted extensive attention due to their excellent properties and wide-ranging electronic and optoelectronic applications. Both theoretical and experimental results have shown that direct bandgap GeSn alloys are preferable for Si-based, high-efficiency light source applications. For the abovementioned purposes, molecular beam epitaxy (MBE), physical vapour deposition (PVD), and chemical vapor deposition (CVD) technologies have been extensively explored to grow high-quality GeSn alloys. However, CVD is the dominant growth method in the industry, and it is therefore more easily transferred. This review is focused on the recent progress in GeSn CVD growth (including ion implantation, in situ doping technology, and ohmic contacts), GeSn detectors, GeSn lasers, and GeSn transistors. These review results will provide huge advancements for the research and development of high-performance electronic and optoelectronic devices. © 2021 by the authors. Licensee MDPI, Basel, Switzerland. | Source Title: | Nanomaterials | URI: | https://scholarbank.nus.edu.sg/handle/10635/232011 | ISSN: | 2079-4991 | DOI: | 10.3390/nano11102556 | Rights: | Attribution 4.0 International |
Appears in Collections: | Staff Publications Elements |
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