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Title: | TEM SAMPLE PREPARATION TECHNIQUES DEVELOPMENT FOR ADVANCED IC INCLUDING FINFETS | Authors: | DIONALDO ZUDHISTIRA | ORCID iD: | orcid.org/0000-0002-2305-5085 | Keywords: | lamella conversion, site-specific pillar sample, tomography | Issue Date: | 25-Apr-2022 | Citation: | DIONALDO ZUDHISTIRA (2022-04-25). TEM SAMPLE PREPARATION TECHNIQUES DEVELOPMENT FOR ADVANCED IC INCLUDING FINFETS. ScholarBank@NUS Repository. | URI: | https://scholarbank.nus.edu.sg/handle/10635/229996 |
Appears in Collections: | Master's Theses (Closed) |
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