Please use this identifier to cite or link to this item: https://scholarbank.nus.edu.sg/handle/10635/229996
Title: TEM SAMPLE PREPARATION TECHNIQUES DEVELOPMENT FOR ADVANCED IC INCLUDING FINFETS
Authors: DIONALDO ZUDHISTIRA
ORCID iD:   orcid.org/0000-0002-2305-5085
Keywords: lamella conversion, site-specific pillar sample, tomography
Issue Date: 25-Apr-2022
Citation: DIONALDO ZUDHISTIRA (2022-04-25). TEM SAMPLE PREPARATION TECHNIQUES DEVELOPMENT FOR ADVANCED IC INCLUDING FINFETS. ScholarBank@NUS Repository.
URI: https://scholarbank.nus.edu.sg/handle/10635/229996
Appears in Collections:Master's Theses (Closed)

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