Please use this identifier to cite or link to this item: https://scholarbank.nus.edu.sg/handle/10635/229996
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dc.titleTEM SAMPLE PREPARATION TECHNIQUES DEVELOPMENT FOR ADVANCED IC INCLUDING FINFETS
dc.contributor.authorDIONALDO ZUDHISTIRA
dc.date.accessioned2022-08-05T18:00:19Z
dc.date.available2022-08-05T18:00:19Z
dc.date.issued2022-04-25
dc.identifier.citationDIONALDO ZUDHISTIRA (2022-04-25). TEM SAMPLE PREPARATION TECHNIQUES DEVELOPMENT FOR ADVANCED IC INCLUDING FINFETS. ScholarBank@NUS Repository.
dc.identifier.urihttps://scholarbank.nus.edu.sg/handle/10635/229996
dc.language.isoen
dc.subjectlamella conversion, site-specific pillar sample, tomography
dc.typeThesis
dc.contributor.departmentMATERIALS SCIENCE AND ENGINEERING
dc.contributor.supervisorMichel Bosman
dc.description.degreeMaster's
dc.description.degreeconferredMASTER OF ENGINEERING (CDE)
dc.identifier.orcid0000-0002-2305-5085
Appears in Collections:Master's Theses (Closed)

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