MEMS-based self-referencing cascaded line-scan camera using single-pixel detectors

Abstract

A microelectromechanical systems (MEMS) based self-referencing cascaded line-scan camera using single-pixel detectors is proposed and verified. Single-pixel detectors make it an attractive low-cost alternative of a traditional line-scan camera that can operate at any wavelength. The proposed system is composed of several identical cascaded line imager units driven by a common actuator. Each unit is an integration of an imaging slit, a MEMS encoding mask, a light concentrator and a single-pixel detector. The spatial resolution of the proposed line-scan camera can thus be N-fold immediately by cascading N units to achieve high spatial resolution. For prototype demonstration, a cascaded line-scan camera composed of two imager units are prepared, with each unit having a single-pixel detector and being capable of resolving 71 spatial pixels along the slit. Hadamard transform multiplexing detection is applied to enhance the camera’s signal-to-noise ratio (SNR). The MEMS encoding mask is resonantly driven at 250 Hz indicating an ideal frame-rate of 500 fps of the line-scan camera prototype. Further increase of frame-rate can be achieved through optimization of the MEMS actuator. Additionally, the MEMS encoding mask incorporates a self-referencing design which simplifies data acquisition process, thus enabling the camera system to work in a simple but efficient open-loop condition. © 2019 Optical Society of America.