Please use this identifier to cite or link to this item: https://doi.org/10.1364/OE.381279
Title: Integration of MEMS IR detectors with MIR waveguides for sensing applications
Authors: Yazici, Mahmut Sami
Dong, Bowei 
Hasan, Dihan
Sun, Fujun
Lee, Chengkuo 
Keywords: Science & Technology
Physical Sciences
Optics
SUBWAVELENGTH GRATING COUPLER
ALUMINUM NITRIDE
NITROUS-OXIDE
MU-M
RESONATORS
Issue Date: 13-Apr-2020
Publisher: OPTICAL SOC AMER
Citation: Yazici, Mahmut Sami, Dong, Bowei, Hasan, Dihan, Sun, Fujun, Lee, Chengkuo (2020-04-13). Integration of MEMS IR detectors with MIR waveguides for sensing applications. OPTICS EXPRESS 28 (8) : 11524-11537. ScholarBank@NUS Repository. https://doi.org/10.1364/OE.381279
Abstract: Waveguides have been utilized for label-free and miniaturized mid-infrared gas sensors that operate on the evanescent field absorption principle. For integrated systems, photodetectors based on the photocarrier generation principle are previously integrated with waveguides. However, due to the thermal excitation of carriers at room temperature, they suffer from large dark currents and noise in the long-wavelength region. In this paper, we introduce the integration of a MEMS-based broadband infrared thermopile sensor with mid-infrared waveguides via flip-chip bonding technology and demonstrate a proof-of-concept gas (N O) sensor working at 3.9 µm. A photonic device with input and output grating couplers designed at 3.72 µm was fabricated on a silicon-on-insulator (SOI) platform and integrated with a bare thermopile chip on its output side via flip-chip bonding in order to realize an integrated photonic platform for a myriad range of sensing applications. A responsivity of 69 mV/W was measured at 3.72 µm for an 11 mm waveguide. A second device designed at 3.9 µm has a 1800 ppm resolution for N O sensing. 2 2
Source Title: OPTICS EXPRESS
URI: https://scholarbank.nus.edu.sg/handle/10635/189721
ISSN: 10944087
DOI: 10.1364/OE.381279
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