Please use this identifier to cite or link to this item: https://scholarbank.nus.edu.sg/handle/10635/159230
Title: PREPARATION AND CHARACTERIZATION OF REACTIVE RF SPUTTERED NITRIDE THIN FILMS
Authors: CHEN GEOK LOO
Issue Date: 1999
Citation: CHEN GEOK LOO (1999). PREPARATION AND CHARACTERIZATION OF REACTIVE RF SPUTTERED NITRIDE THIN FILMS. ScholarBank@NUS Repository.
URI: https://scholarbank.nus.edu.sg/handle/10635/159230
Appears in Collections:Master's Theses (Restricted)

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