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https://scholarbank.nus.edu.sg/handle/10635/158747
| Title: | EFFECTS OF RF POWER AND ANNEALING ON THE PROPERTIES OF RF SPUTTERED AMORPHOUS SILICON CARBIDE FILMS | Authors: | CHONG NYOK BOON | Issue Date: | 2001 | Citation: | CHONG NYOK BOON (2001). EFFECTS OF RF POWER AND ANNEALING ON THE PROPERTIES OF RF SPUTTERED AMORPHOUS SILICON CARBIDE FILMS. ScholarBank@NUS Repository. | URI: | https://scholarbank.nus.edu.sg/handle/10635/158747 |
| Appears in Collections: | Master's Theses (Restricted) |
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