Please use this identifier to cite or link to this item:
https://scholarbank.nus.edu.sg/handle/10635/158747
DC Field | Value | |
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dc.title | EFFECTS OF RF POWER AND ANNEALING ON THE PROPERTIES OF RF SPUTTERED AMORPHOUS SILICON CARBIDE FILMS | |
dc.contributor.author | CHONG NYOK BOON | |
dc.date.accessioned | 2019-09-16T02:37:07Z | |
dc.date.available | 2019-09-16T02:37:07Z | |
dc.date.issued | 2001 | |
dc.identifier.citation | CHONG NYOK BOON (2001). EFFECTS OF RF POWER AND ANNEALING ON THE PROPERTIES OF RF SPUTTERED AMORPHOUS SILICON CARBIDE FILMS. ScholarBank@NUS Repository. | |
dc.identifier.uri | https://scholarbank.nus.edu.sg/handle/10635/158747 | |
dc.source | CCK BATCHLOAD 20190911 | |
dc.type | Thesis | |
dc.contributor.department | ELECTRICAL AND COMPUTER ENGINEERING | |
dc.contributor.supervisor | CHOI WEE KIONG | |
dc.contributor.supervisor | TAN LENG SEOW | |
dc.description.degree | Master's | |
dc.description.degreeconferred | MASTER OF ENGINEERING | |
Appears in Collections: | Master's Theses (Restricted) |
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