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| Title: | Silicon surface passivation by aluminium oxide studied with electron energy loss spectroscopy | Authors: | Hoex, Bram Bosman, Michel Nandakumar, Naomi Kessels, WMM |
Keywords: | Science & Technology Technology Physical Sciences Materials Science, Multidisciplinary Physics, Applied Physics, Condensed Matter Materials Science Physics surface passivation Al2O3 electron energy loss spectroscopy silicon wafers solar cells CHEMICAL-VAPOR-DEPOSITION ATOMIC-LAYER-DEPOSITION ALD AL2O3 SI RECOMBINATION |
Issue Date: | 1-Nov-2013 | Publisher: | WILEY-V C H VERLAG GMBH | Citation: | Hoex, Bram, Bosman, Michel, Nandakumar, Naomi, Kessels, WMM (2013-11-01). Silicon surface passivation by aluminium oxide studied with electron energy loss spectroscopy. PHYSICA STATUS SOLIDI-RAPID RESEARCH LETTERS 7 (11) : 937-941. ScholarBank@NUS Repository. | Abstract: | The origin behind crystalline silicon surface passivation by Al2O3films is studied in detail by means of spatially-resolved electron energy loss spectroscopy. The bonding configurations of Al and O are studied in as-deposited and annealed Al2O3films grown on c-Si substrates by plasma-assisted and thermal atomic layer deposition. The results confirm the presence of an interfacial SiO2-like film and demonstrate changes in the ratio between tetrahedrally and octahedrally coordinated Al in the films after annealing. These observations reveal the underlying origin of c-Si surface passivation by Al2O3. (© 2013 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim) The origin behind crystalline silicon surface passivation by Al2O3films is studied in detail by means of spatially-resolved electron energy loss spectroscopy. The results confirm the presence of an interfacial SiO2-like film and demonstrate changes in the ratio between tetrahedrally and octahedrally coordinated Al in the films after annealing. These observations reveal the underlying origin of c-Si surface passivation by Al2O3. © 2013 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim. | Source Title: | PHYSICA STATUS SOLIDI-RAPID RESEARCH LETTERS | URI: | https://scholarbank.nus.edu.sg/handle/10635/155058 | ISSN: | 1862-6254 1862-6270 |
| Appears in Collections: | Staff Publications Elements |
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