Bilayered Pb(Zr,Ti)O3/(Bi,Nd)4Ti3O 12 thin films

Abstract

Bilayered thin films consisting of Pb(Zr0.52Ti0.48) O3 (PZT) and (Bi3.15Nd0.85)Ti3O 12 (BNT) layers are successfully deposited on Si(100)/SiO 2/Ti/Pt substrate by a combined process involving sol-gel and RF-sputtering. Their dielectric properties cannot be described by the simple rule of mixture on the basis of the series connection model. There occurs a dielectric layer of lower dielectric permittivity in the bilayered thin film, which degrades the polarization behaviors. The bilayered film gives rise to an improvement in fatigue resistance up to 1010 switching cycles. Moreover, the domain pinning effect after polarization switching is reduced greatly as compared to that of single layered PZT and BNT thin films. © Springer Science + Business Media, LLC 2006.