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Title: Synthesis of pure C40 TiSi2 for Si wafer fabrication
Authors: Chen, S.Y.
Shen, Z.X. 
Xu, S.Y. 
See, A.K. 
Chan, L.H.
Li, W.S. 
Keywords: 0.1 μm technology
C40 TiSi2
Laser thermal processing (LTP)
Issue Date: 2002
Citation: Chen, S.Y., Shen, Z.X., Xu, S.Y., See, A.K., Chan, L.H., Li, W.S. (2002). Synthesis of pure C40 TiSi2 for Si wafer fabrication. Proceedings of SPIE - The International Society for Optical Engineering 4426 : 272-275. ScholarBank@NUS Repository.
Abstract: A simple and novel salicidation process applying pulsed laser annealing as the first annealing step was used to induce TiSi2 formation. Both Raman spectroscopy and transmission electron microscope results confirm the formation of a new phase of Ti disilicide, the pure C40 TiSi2 after laser irradiation. Direct C54 phase growth on the basis of C40 template bypassing the C49 phase is accomplished at the second annealing temperature as low as 600°C. Line width independent formation of the C54 phase was observed on patterned wafers using this salicidation process and "fine line effect" is thus eliminated.
Source Title: Proceedings of SPIE - The International Society for Optical Engineering
ISSN: 0277786X
DOI: 10.1117/12.456893
Appears in Collections:Staff Publications

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