Please use this identifier to cite or link to this item: https://doi.org/10.1007/s00542-008-0614-3
Title: Pulsed electrodeposition of high aspect-ratio NiFe assemblies and its influence on spatial alloy composition
Authors: Giro, F.
Bedner, K.
Dhum, C.
Hoffmann, J.E.
Heussler, S.P. 
Jian, L. 
Kirsch, U.
Moser, H.O. 
Saumer, M.
Issue Date: Aug-2008
Citation: Giro, F., Bedner, K., Dhum, C., Hoffmann, J.E., Heussler, S.P., Jian, L., Kirsch, U., Moser, H.O., Saumer, M. (2008-08). Pulsed electrodeposition of high aspect-ratio NiFe assemblies and its influence on spatial alloy composition. Microsystem Technologies 14 (8) : 1111-1115. ScholarBank@NUS Repository. https://doi.org/10.1007/s00542-008-0614-3
Abstract: Direct- and pulse-reverse current electrodeposition processes and their influence on the spatial nickel-iron alloy composition are described. High-aspect ratio gear wheel structures are electroplated from a nickel sulphate/iron sulphate bath. Subsequent determination of the iron content at the gear-wheels cross section using scanning electron microscopy demonstrates that pulse reverse plating results in an uniform alloy composition across different structure dimensions. By contrast, local variations in iron content were observed in case of direct current plating. © 2008 Springer-Verlag.
Source Title: Microsystem Technologies
URI: http://scholarbank.nus.edu.sg/handle/10635/113037
ISSN: 09467076
DOI: 10.1007/s00542-008-0614-3
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