Chen Bing-Hung

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Full Name

Chen Bing-Hung

Variants

Chen, B.H.
Chen, B.-H.

Main Affiliation

CHEMICAL & ENVIRONMENTAL ENGINEERING

Faculty

ENGINEERING

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Date Issued: [2000 TO 2023]

Author: Chan, L.

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		Issue Date	Title	Author(s)
	1	Jul-2004	Effect of halogen in high-density oxygen plasmas on photoresist trimming	Sin, C.-Y.; Chen, B.-H. ; Loh, W.L.; Yu, J.; Yelehanka, P.; See, A.; Chan, L.
	2	Sep-2002	Resist trimming in high-density CF4/O2 plasmas for sub-0.1 μm device fabrication	Sin, C.-Y.; Chen, B.-H. ; Loh, W.L.; Yu, J.; Yelehanka, P.; See, A.; Chan, L.