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Ee Beng, Arthur Tay

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Full Name
Ee Beng, Arthur Tay
Variants
Tay, Arthur
Tay, A.
Tay, E.B.
 
Main Affiliation
 
Faculty
 
Email
eletaya@nus.edu.sg
 

Publications

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Author:  Tay, A.
Subject:  Lithography
Date Issued:  2007

Results 1-4 of 4 (Search time: 0.003 seconds).

Issue DateTitleAuthor(s)
12007Influence of wafer warpage on photoresist film thickness and extinction coefficient measurementsWu, X.; Tay, A. 
2Jan-2007Real-time control of photoresist extinction coefficient uniformity in the microlithography processTay, A. ; Ho, W.K. ; Wu, X.
32007Real-time spatial control of photoresist development rateTay, A. ; Ho, W.-K. ; Hu, N.; Kiew, C.-M.; Tsai, K.-Y.
4Feb-2007Temperature control and in situ fault detection of wafer warpageHo, W.K. ; Yap, C. ; Tay, A. ; Chen, W.; Zhou, Y.; Tan, W.W. ; Chen, M.