Ee Beng, Arthur Tay

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Full Name

Ee Beng, Arthur Tay

Variants

Tay, Arthur
Tay, A.
Tay, E.B.

Main Affiliation

ELECTRICAL AND COMPUTER ENGINEERING
COLLEGE OF DESIGN AND ENGINEERING
DEAN'S OFFICE (COLLEGE OF DESIGN & ENG)

Faculty

FAC OF ENGINEERING
COLLEGE OF DESIGN & ENG

eletaya@nus.edu.sg

Refined By:

Author: Tay, A.

Author: Wu, X.

Subject: Real-time control

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		Issue Date	Title	Author(s)
	1	2009	In-situ monitoring and control of photoresist parameters during thermal processing in the lithography sequence	Wu, X.; Yang, G.; Lim, E.-X.; Tay, A.
	2	Jan-2007	Real-time control of photoresist extinction coefficient uniformity in the microlithography process	Tay, A. ; Ho, W.K. ; Wu, X.