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Lu, Dong

rp01949

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Full Name
Lu, Dong
Variants
Lu, D.
 
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Department:  INSTITUTE OF MICROELECTRONICS
Subject:  Atomic force microscopy (AFM)

Results 1-1 of 1 (Search time: 0.001 seconds).

Issue DateTitleAuthor(s)
1Aug-2005Influence of plasma treatment on low-k dielectric films in semiconductor manufacturingYang, P. ; Lu, D. ; Kumar, R. ; Moser, H.O.