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|Title:||High-k integration and interface engineering for III-V MOSFETs|
|Authors:||Oh, H.J. |
|Citation:||Oh, H.J., Sumarlina, A.B.S., Lee, S.J. (2011). High-k integration and interface engineering for III-V MOSFETs. ECS Transactions 35 (4) : 481-495. ScholarBank@NUS Repository. https://doi.org/10.1149/1.3572300|
|Abstract:||In this work, we report the comprehensive study of performance enhancement of InGaAs n-MOSFET by plasma PH3 passivation. The calibrated plasma PH3 passivation of the InGaAs surface before CVD high-k dielectric deposition significantly improves interface quality, resulting in suppressed frequency dispersion in C-V, increase in drive-current with high electron mobility, and excellent thermal stability. ©The Electrochemical Society.|
|Source Title:||ECS Transactions|
|Appears in Collections:||Staff Publications|
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