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https://doi.org/10.1109/VTSA.2007.378954
Title: | Enhanced carrier transport in strained bulk N-MOSFETs with silicon-carbon source/drain stressors | Authors: | Ang, K.-W. Chui, K.-J. Tung, C.-H. Samudra, G. Balasubramanian, N. Yeo, Y.-C. |
Issue Date: | 2007 | Citation: | Ang, K.-W.,Chui, K.-J.,Tung, C.-H.,Samudra, G.,Balasubramanian, N.,Yeo, Y.-C. (2007). Enhanced carrier transport in strained bulk N-MOSFETs with silicon-carbon source/drain stressors. International Symposium on VLSI Technology, Systems, and Applications, Proceedings : -. ScholarBank@NUS Repository. https://doi.org/10.1109/VTSA.2007.378954 | Abstract: | We report the demonstration of strained n-channel transistor with silicon-carbon (Si1-yCy) source/drain (S/D) stressors for enhanced drive current Ion performance. At a fixed DIBL of 0.15 V/V, n-FETs with Si1-yCy S/D demonstrate a significant I on improvement of 30% over the unstrained control n-FETs. This improvement is attributed to the carrier mobility gain as a result of the lateral tensile strain and vertical compressive strain in the transistor channel. © 2007 IEEE. | Source Title: | International Symposium on VLSI Technology, Systems, and Applications, Proceedings | URI: | http://scholarbank.nus.edu.sg/handle/10635/83698 | ISBN: | 1424405858 | DOI: | 10.1109/VTSA.2007.378954 |
Appears in Collections: | Staff Publications |
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