Please use this identifier to cite or link to this item:
https://doi.org/10.1109/VTSA.2007.378954
DC Field | Value | |
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dc.title | Enhanced carrier transport in strained bulk N-MOSFETs with silicon-carbon source/drain stressors | |
dc.contributor.author | Ang, K.-W. | |
dc.contributor.author | Chui, K.-J. | |
dc.contributor.author | Tung, C.-H. | |
dc.contributor.author | Samudra, G. | |
dc.contributor.author | Balasubramanian, N. | |
dc.contributor.author | Yeo, Y.-C. | |
dc.date.accessioned | 2014-10-07T04:44:10Z | |
dc.date.available | 2014-10-07T04:44:10Z | |
dc.date.issued | 2007 | |
dc.identifier.citation | Ang, K.-W.,Chui, K.-J.,Tung, C.-H.,Samudra, G.,Balasubramanian, N.,Yeo, Y.-C. (2007). Enhanced carrier transport in strained bulk N-MOSFETs with silicon-carbon source/drain stressors. International Symposium on VLSI Technology, Systems, and Applications, Proceedings : -. ScholarBank@NUS Repository. <a href="https://doi.org/10.1109/VTSA.2007.378954" target="_blank">https://doi.org/10.1109/VTSA.2007.378954</a> | |
dc.identifier.isbn | 1424405858 | |
dc.identifier.uri | http://scholarbank.nus.edu.sg/handle/10635/83698 | |
dc.description.abstract | We report the demonstration of strained n-channel transistor with silicon-carbon (Si1-yCy) source/drain (S/D) stressors for enhanced drive current Ion performance. At a fixed DIBL of 0.15 V/V, n-FETs with Si1-yCy S/D demonstrate a significant I on improvement of 30% over the unstrained control n-FETs. This improvement is attributed to the carrier mobility gain as a result of the lateral tensile strain and vertical compressive strain in the transistor channel. © 2007 IEEE. | |
dc.description.uri | http://libproxy1.nus.edu.sg/login?url=http://dx.doi.org/10.1109/VTSA.2007.378954 | |
dc.source | Scopus | |
dc.type | Conference Paper | |
dc.contributor.department | ELECTRICAL & COMPUTER ENGINEERING | |
dc.description.doi | 10.1109/VTSA.2007.378954 | |
dc.description.sourcetitle | International Symposium on VLSI Technology, Systems, and Applications, Proceedings | |
dc.description.page | - | |
dc.identifier.isiut | NOT_IN_WOS | |
Appears in Collections: | Staff Publications |
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