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|Title:||Optical properties of hydrogenated amorphous silicon carbide films|
|Citation:||Choi, W.K. (2000). Optical properties of hydrogenated amorphous silicon carbide films. Diffusion and Defect Data. Pt A Defect and Diffusion Forum 177 : 29-42. ScholarBank@NUS Repository.|
|Abstract:||The influence of plasma enhanced chemical vapour deposition conditions (rf power, hydrogen dilution), hydrocarbon source material, dopants and deposition techniques on the optical properties of hydrogenated amorphous silicon carbide (a-Si1-xCx:H) films were examined. The parameters used for the discussion were the optical gap, the refractive index and the edge width parameter. The photoluminescence results of a-Si1-xCx:H films were also presented in this paper.|
|Source Title:||Diffusion and Defect Data. Pt A Defect and Diffusion Forum|
|Appears in Collections:||Staff Publications|
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