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| Title: | Optical properties of hydrogenated amorphous silicon carbide films | Authors: | Choi, W.K. | Issue Date: | 2000 | Citation: | Choi, W.K. (2000). Optical properties of hydrogenated amorphous silicon carbide films. Diffusion and Defect Data. Pt A Defect and Diffusion Forum 177 : 29-42. ScholarBank@NUS Repository. | Abstract: | The influence of plasma enhanced chemical vapour deposition conditions (rf power, hydrogen dilution), hydrocarbon source material, dopants and deposition techniques on the optical properties of hydrogenated amorphous silicon carbide (a-Si1-xCx:H) films were examined. The parameters used for the discussion were the optical gap, the refractive index and the edge width parameter. The photoluminescence results of a-Si1-xCx:H films were also presented in this paper. | Source Title: | Diffusion and Defect Data. Pt A Defect and Diffusion Forum | URI: | http://scholarbank.nus.edu.sg/handle/10635/80902 | ISSN: | 10120386 |
| Appears in Collections: | Staff Publications |
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