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https://scholarbank.nus.edu.sg/handle/10635/61815
| Title: | An on-pole-piece-tip deflector for high-resolution, low-voltage scanning electron microscopes | Authors: | Zhao, Y. Khursheed, A. |
Keywords: | Immersion objective lenses In-lens deflectors Moving objective lenses Scanning electron microscopes Toroidal coils |
Issue Date: | Jan-1998 | Citation: | Zhao, Y.,Khursheed, A. (1998-01). An on-pole-piece-tip deflector for high-resolution, low-voltage scanning electron microscopes. Scanning 20 (1) : 10-16. ScholarBank@NUS Repository. | Abstract: | A proposal to enlarge the field of view of low-voltage, high-resolution scanning electron microscopes is presented in this paper. The proposal is based upon mounting primary beam deflectors onto the pole tip of the objective lens. Simulation results show that this compact arrangement of beam deflection should widen the present attainable field of view at probe resolutions < 5 nm by over an order of magnitude. | Source Title: | Scanning | URI: | http://scholarbank.nus.edu.sg/handle/10635/61815 | ISSN: | 01610457 |
| Appears in Collections: | Staff Publications |
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