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Please use this identifier to cite or link to this item: https://scholarbank.nus.edu.sg/handle/10635/61815
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dc.titleAn on-pole-piece-tip deflector for high-resolution, low-voltage scanning electron microscopes
dc.contributor.authorZhao, Y.
dc.contributor.authorKhursheed, A.
dc.date.accessioned2014-06-17T06:44:17Z
dc.date.available2014-06-17T06:44:17Z
dc.date.issued1998-01
dc.identifier.citationZhao, Y.,Khursheed, A. (1998-01). An on-pole-piece-tip deflector for high-resolution, low-voltage scanning electron microscopes. Scanning 20 (1) : 10-16. ScholarBank@NUS Repository.
dc.identifier.issn01610457
dc.identifier.urihttp://scholarbank.nus.edu.sg/handle/10635/61815
dc.description.abstractA proposal to enlarge the field of view of low-voltage, high-resolution scanning electron microscopes is presented in this paper. The proposal is based upon mounting primary beam deflectors onto the pole tip of the objective lens. Simulation results show that this compact arrangement of beam deflection should widen the present attainable field of view at probe resolutions < 5 nm by over an order of magnitude.
dc.sourceScopus
dc.subjectImmersion objective lenses
dc.subjectIn-lens deflectors
dc.subjectMoving objective lenses
dc.subjectScanning electron microscopes
dc.subjectToroidal coils
dc.typeArticle
dc.contributor.departmentELECTRICAL ENGINEERING
dc.description.sourcetitleScanning
dc.description.volume20
dc.description.issue1
dc.description.page10-16
dc.description.codenSCNND
dc.identifier.isiutNOT_IN_WOS
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