Please use this identifier to cite or link to this item: http://scholarbank.nus.edu.sg/handle/10635/61815
Title: An on-pole-piece-tip deflector for high-resolution, low-voltage scanning electron microscopes
Authors: Zhao, Y.
Khursheed, A. 
Keywords: Immersion objective lenses
In-lens deflectors
Moving objective lenses
Scanning electron microscopes
Toroidal coils
Issue Date: Jan-1998
Source: Zhao, Y.,Khursheed, A. (1998-01). An on-pole-piece-tip deflector for high-resolution, low-voltage scanning electron microscopes. Scanning 20 (1) : 10-16. ScholarBank@NUS Repository.
Abstract: A proposal to enlarge the field of view of low-voltage, high-resolution scanning electron microscopes is presented in this paper. The proposal is based upon mounting primary beam deflectors onto the pole tip of the objective lens. Simulation results show that this compact arrangement of beam deflection should widen the present attainable field of view at probe resolutions < 5 nm by over an order of magnitude.
Source Title: Scanning
URI: http://scholarbank.nus.edu.sg/handle/10635/61815
ISSN: 01610457
Appears in Collections:Staff Publications

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