Please use this identifier to cite or link to this item: https://doi.org/10.1063/1.3675878
Title: Piezoresistive silicon nanowire based nanoelectromechanical system cantilever air flow sensor
Authors: Zhang, S.
Lou, L.
Lee, C. 
Issue Date: 9-Jan-2012
Source: Zhang, S.,Lou, L.,Lee, C. (2012-01-09). Piezoresistive silicon nanowire based nanoelectromechanical system cantilever air flow sensor. Applied Physics Letters 100 (2) : -. ScholarBank@NUS Repository. https://doi.org/10.1063/1.3675878
Abstract: We present nanoelectromechanical system based cantilever air flow sensor using silicon nanowires (SiNWs). The cantilever is fabricated in the complementary metal-oxide-semiconductor compatible process with dimension of 90 μm 20 μm 3 μm. SiNWs with the size of 2 μm × 90 nm × 90 nm (length × width × height) are embedded at the edge of the cantilever fixed end to experience the maximum air flow induced strain. Compared with recently reported air flow sensors, our device shows a better sensitivity of 198 Ω/m/s and a flow sensing range up to 65 m/s. In addition, improvements in terms of linearity, hysteresis, and lower power consumption are reported as well. © 2012 American Institute of Physics.
Source Title: Applied Physics Letters
URI: http://scholarbank.nus.edu.sg/handle/10635/57067
ISSN: 00036951
DOI: 10.1063/1.3675878
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