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https://doi.org/10.1063/1.3675878
Title: | Piezoresistive silicon nanowire based nanoelectromechanical system cantilever air flow sensor | Authors: | Zhang, S. Lou, L. Lee, C. |
Issue Date: | 9-Jan-2012 | Citation: | Zhang, S., Lou, L., Lee, C. (2012-01-09). Piezoresistive silicon nanowire based nanoelectromechanical system cantilever air flow sensor. Applied Physics Letters 100 (2) : -. ScholarBank@NUS Repository. https://doi.org/10.1063/1.3675878 | Abstract: | We present nanoelectromechanical system based cantilever air flow sensor using silicon nanowires (SiNWs). The cantilever is fabricated in the complementary metal-oxide-semiconductor compatible process with dimension of 90 μm 20 μm 3 μm. SiNWs with the size of 2 μm × 90 nm × 90 nm (length × width × height) are embedded at the edge of the cantilever fixed end to experience the maximum air flow induced strain. Compared with recently reported air flow sensors, our device shows a better sensitivity of 198 Ω/m/s and a flow sensing range up to 65 m/s. In addition, improvements in terms of linearity, hysteresis, and lower power consumption are reported as well. © 2012 American Institute of Physics. | Source Title: | Applied Physics Letters | URI: | http://scholarbank.nus.edu.sg/handle/10635/57067 | ISSN: | 00036951 | DOI: | 10.1063/1.3675878 |
Appears in Collections: | Staff Publications |
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