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|Title:||Piezoresistive silicon nanowire based nanoelectromechanical system cantilever air flow sensor|
|Citation:||Zhang, S., Lou, L., Lee, C. (2012-01-09). Piezoresistive silicon nanowire based nanoelectromechanical system cantilever air flow sensor. Applied Physics Letters 100 (2) : -. ScholarBank@NUS Repository. https://doi.org/10.1063/1.3675878|
|Abstract:||We present nanoelectromechanical system based cantilever air flow sensor using silicon nanowires (SiNWs). The cantilever is fabricated in the complementary metal-oxide-semiconductor compatible process with dimension of 90 μm 20 μm 3 μm. SiNWs with the size of 2 μm × 90 nm × 90 nm (length × width × height) are embedded at the edge of the cantilever fixed end to experience the maximum air flow induced strain. Compared with recently reported air flow sensors, our device shows a better sensitivity of 198 Ω/m/s and a flow sensing range up to 65 m/s. In addition, improvements in terms of linearity, hysteresis, and lower power consumption are reported as well. © 2012 American Institute of Physics.|
|Source Title:||Applied Physics Letters|
|Appears in Collections:||Staff Publications|
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