Please use this identifier to cite or link to this item:
https://doi.org/10.1063/1.3675878
DC Field | Value | |
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dc.title | Piezoresistive silicon nanowire based nanoelectromechanical system cantilever air flow sensor | |
dc.contributor.author | Zhang, S. | |
dc.contributor.author | Lou, L. | |
dc.contributor.author | Lee, C. | |
dc.date.accessioned | 2014-06-17T03:01:52Z | |
dc.date.available | 2014-06-17T03:01:52Z | |
dc.date.issued | 2012-01-09 | |
dc.identifier.citation | Zhang, S., Lou, L., Lee, C. (2012-01-09). Piezoresistive silicon nanowire based nanoelectromechanical system cantilever air flow sensor. Applied Physics Letters 100 (2) : -. ScholarBank@NUS Repository. https://doi.org/10.1063/1.3675878 | |
dc.identifier.issn | 00036951 | |
dc.identifier.uri | http://scholarbank.nus.edu.sg/handle/10635/57067 | |
dc.description.abstract | We present nanoelectromechanical system based cantilever air flow sensor using silicon nanowires (SiNWs). The cantilever is fabricated in the complementary metal-oxide-semiconductor compatible process with dimension of 90 μm 20 μm 3 μm. SiNWs with the size of 2 μm × 90 nm × 90 nm (length × width × height) are embedded at the edge of the cantilever fixed end to experience the maximum air flow induced strain. Compared with recently reported air flow sensors, our device shows a better sensitivity of 198 Ω/m/s and a flow sensing range up to 65 m/s. In addition, improvements in terms of linearity, hysteresis, and lower power consumption are reported as well. © 2012 American Institute of Physics. | |
dc.description.uri | http://libproxy1.nus.edu.sg/login?url=http://dx.doi.org/10.1063/1.3675878 | |
dc.source | Scopus | |
dc.type | Article | |
dc.contributor.department | ELECTRICAL & COMPUTER ENGINEERING | |
dc.description.doi | 10.1063/1.3675878 | |
dc.description.sourcetitle | Applied Physics Letters | |
dc.description.volume | 100 | |
dc.description.issue | 2 | |
dc.description.page | - | |
dc.description.coden | APPLA | |
dc.identifier.isiut | 000299126800067 | |
Appears in Collections: | Staff Publications |
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